Invention Grant
- Patent Title: Laser apparatus and extreme ultraviolet light generating system
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Application No.: US16052658Application Date: 2018-08-02
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Publication No.: US10897118B2Publication Date: 2021-01-19
- Inventor: Yoshiaki Kurosawa
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/23
- IPC: H01S3/23 ; H01S3/104 ; H01S3/10 ; H01S5/0683 ; H01S3/00 ; H01S5/34 ; H01S3/223 ; H01S5/40 ; H01S3/134 ; H05G2/00 ; G03F7/20

Abstract:
The laser apparatus includes a master oscillator, an amplifier, a power source, and a controller to control the power source. The controller controls the power source such that an excitation intensity of the amplifier in a burst oscillation period performing the burst oscillation is a first excitation intensity, controls the power source such that, if the predetermined repetition frequency is a first repetition frequency, an excitation intensity of the amplifier in a suspension period suspending the burst oscillation is a second excitation intensity equal to or lower than the first excitation intensity, and controls the power source such that, if the predetermined repetition frequency is a second repetition frequency higher than the first repetition frequency, the excitation intensity of the amplifier in the suspension period is a third excitation intensity lower than the second excitation intensity.
Public/Granted literature
- US20180375283A1 LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM Public/Granted day:2018-12-27
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