Invention Grant
- Patent Title: Nanoparticle continuous-coating device and method based on spatial atomic layer deposition
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Application No.: US15978615Application Date: 2018-05-14
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Publication No.: US10914006B2Publication Date: 2021-02-09
- Inventor: Rong Chen , Weiming Ba , Kai Qu , Yun Li , Kun Cao , Wei Dan
- Applicant: Huazhong University of Science and Technology
- Applicant Address: CN Wuhan
- Assignee: Huazhong University of Science and Technology
- Current Assignee: Huazhong University of Science and Technology
- Current Assignee Address: CN Wuhan
- Agency: Maier & Maier, PLLC
- Priority: CN2017104237645 20170607
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/44

Abstract:
A nanoparticle continuous-coating device based on spatial atomic layer deposition. A first-stage pipeline unit, a second-stage pipeline unit, a third-stage pipeline unit and a fourth-stage pipeline unit which are connected sequentially. The first-stage pipeline unit is used for providing a first precursor and enabling the first precursor to be adsorbed on surfaces of nanoparticles. The third-stage pipeline unit is used for providing a second precursor and enabling the second precursor to react with the first precursor on the surfaces of the nanoparticles, so that a monomolecular thin film layer is generated on the surfaces of the nanoparticles. The second-stage and fourth-stage pipeline units are used for cleaning the nanoparticles and discharging the redundant first precursor, the redundant second precursor or reaction by-products.
Public/Granted literature
- US20180355482A1 NANOPARTICLE CONTINUOUS-COATING DEVICE AND METHOD BASED ON SPATIAL ATOMIC LAYER DEPOSITION Public/Granted day:2018-12-13
Information query
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