Invention Grant
- Patent Title: Observation apparatus and observation method
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Application No.: US16204372Application Date: 2018-11-29
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Publication No.: US10914676B2Publication Date: 2021-02-09
- Inventor: Naoki Fukutake
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2016-107936 20160530
- Main IPC: G01J3/44
- IPC: G01J3/44 ; G01N21/27 ; G01N21/64 ; G01N21/65 ; G02B21/00
Abstract:
An observation apparatus in this embodiment includes a light source configured to irradiate an observation target with light, and a processing unit configured to generate an image based on Rayleigh scattered light derived from χ(3) included in light obtained from the observation target.
Public/Granted literature
- US20190094133A1 OBSERVATION APPARATUS AND OBSERVATION METHOD Public/Granted day:2019-03-28
Information query
