Invention Grant
- Patent Title: Measuring apparatus, method, and storage medium
-
Application No.: US16249213Application Date: 2019-01-16
-
Publication No.: US10914794B2Publication Date: 2021-02-09
- Inventor: Yoshiyuki Hata
- Applicant: ADVANTEST CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ADVANTEST CORPORATION
- Current Assignee: ADVANTEST CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2018-007258 20180119
- Main IPC: G01R33/00
- IPC: G01R33/00 ; G01R33/02

Abstract:
A measuring apparatus that measures a measurement target amount generated from a measurement target, includes an additional amount generating section, a sensor, and a deriving section. The additional amount generating section generates an additional amount to be added to the measurement target amount. The sensor measures a composite amount of the measurement target amount added with the additional amount. The deriving section derives the measurement target amount from an output of the sensor. The additional amount is a pulse. The pulse has an amplitude higher than the absolute value of the maximum of the measurement target amount. The maximum of the pulse is zero. The pulse has a frequency high enough to ignore the 1/f noise. The deriving section detects the output value of the sensor to derive the measurement target amount.
Public/Granted literature
- US20190227128A1 MEASURING APPARATUS, METHOD, AND STORAGE MEDIUM Public/Granted day:2019-07-25
Information query