Invention Grant
- Patent Title: Monolithic integrated circuits with multiple types of embedded non-volatile memory devices
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Application No.: US16464023Application Date: 2016-12-27
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Publication No.: US10916583B2Publication Date: 2021-02-09
- Inventor: Yih Wang
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2016/068667 WO 20161227
- International Announcement: WO2018/125038 WO 20180705
- Main IPC: H01L27/22
- IPC: H01L27/22 ; G11C5/06 ; H01L27/24 ; H01L43/04 ; H01L43/06 ; H01L43/08 ; H01L43/10 ; H01L43/14 ; H01L45/00

Abstract:
Circuits are described that use metallization on both sides techniques to integrate two different types of non-volatile embedded memory devices within a single monolithic integrated circuit device. In an embodiment, a monolithic integrated circuit structure is provided that includes a device layer having one or more logic transistors. A front side interconnect layer is provided above the device layer, as seen in a vertical cross-section taken through the monolithic integrated circuit from top to bottom. A back side interconnect layer is provided below the device layer, as seen in the vertical cross-section. A first type of non-volatile memory device is provided in the front side interconnect layer, and a second type of non-volatile memory device different from the first type of non-volatile memory device is provided in the back side interconnect layer. A back side contact may be used to connect the device layer to a back side interconnect layer.
Public/Granted literature
- US20190386062A1 MONOLITHIC INTEGRATED CIRCUITS WITH MULTIPLE TYPES OF EMBEDDED NON-VOLATILE MEMORY DEVICES Public/Granted day:2019-12-19
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