Invention Grant
- Patent Title: Nanosheet devices with improved electrostatic integrity
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Application No.: US16397541Application Date: 2019-04-29
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Publication No.: US10916630B2Publication Date: 2021-02-09
- Inventor: Ruilong Xie , Chi-Chun Liu , Cheng Chi , Kangguo Cheng
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Douglas Pearson
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/66 ; H01L29/06 ; H01L29/78 ; H01L21/308 ; H01L21/02 ; H01L29/16

Abstract:
Semiconductor devices and methods of forming the same include forming spacers on respective sidewalls above a stack of alternating channel layers and sacrificial layers, leaving an opening between the spacers. The stack is etched, between the spacers, to form a central opening in the stack that separates the channel layers into respective pairs of channel structures. The sacrificial material is etched away to expose top and bottom surfaces of the channel structures. A gate stack is formed on, between, and around the channel structures, including in the central opening between pairs of channel structures.
Public/Granted literature
- US20200343342A1 NANOSHEET DEVICES WITH IMPROVED ELECTROSTATIC INTEGRITY Public/Granted day:2020-10-29
Information query
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