Invention Grant
- Patent Title: Asymmetric transistors and related devices and methods
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Application No.: US16349210Application Date: 2016-12-28
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Publication No.: US10916652B2Publication Date: 2021-02-09
- Inventor: Yen Chun Lee
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2016/068815 WO 20161228
- International Announcement: WO2018/125074 WO 20180705
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/78 ; G11C13/00 ; H01L21/8234 ; H01L27/24 ; H01L29/08 ; H01L29/66 ; H01L45/00

Abstract:
Asymmetric transistors and related methods and devices are disclosed. A transistor includes a semiconductor material doped with a first type of charge carriers along the gate oxide according to an asymmetric doping profile with a halo region on a source side. The transistor also includes a source including a lightly doped drain (LDD) on the source side, and a drain having a doping profile of charge carriers of a second type graded in a decreasing manner toward the source side. A method includes applying a large angle tilt implant drain (LATID) process to a drain side, a halo implant process to a source side, and applying an LDD process on the source side. A memory device includes an asymmetric transistor. A computing device includes an asymmetric transistor.
Information query
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