Invention Grant
- Patent Title: Two-dimensional position encoder
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Application No.: US16220624Application Date: 2018-12-14
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Publication No.: US10921718B2Publication Date: 2021-02-16
- Inventor: Zhiqiang Liu , Eric Goodwin , Goldie Goldstein
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Roeder & Broder LLP
- Agent Steven G. Roeder
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G03F7/20 ; G01B11/00 ; G01D5/38

Abstract:
A position encoder for monitoring relative movement between a first object and a second object includes a grating that is coupled to the first object, and an image sensor assembly that is coupled to the second object. The image sensor includes a first image sensor; a second image sensor that is spaced apart from the first image sensor; an optical element that includes a first optical surface and a second optical surface that is spaced apart from the first optical surface; and an illumination system. The illumination system directs an illumination beam at the optical element to create (i) a first reference beam that is reflected by the first optical surface and directed at the first image sensor, (ii) a second reference beam that is reflected by the second optical surface and directed at the second image sensor, and (iii) a transmitted beam that is transmitted through the optical element and is directed at and impinges on the grating to create a first measurement beam that is diffracted by the grating and directed at the first image sensor, and a second measurement beam that is diffracted by the grating and directed at the second image sensor.
Public/Granted literature
- US20190187572A1 TWO-DIMENSIONAL POSITION ENCODER Public/Granted day:2019-06-20
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