Invention Grant
- Patent Title: Methods for preparing self-assembled monolayers
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Application No.: US16033485Application Date: 2018-07-12
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Publication No.: US10937645B2Publication Date: 2021-03-02
- Inventor: Elina Färm
- Applicant: ASM IP HOLDING B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP HOLDING B.V.
- Current Assignee: ASM IP HOLDING B.V.
- Current Assignee Address: NL Almere
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01L21/02 ; H01L21/321 ; B05D1/00 ; H01L21/3105 ; C23C16/04 ; C23C16/54 ; C23C16/46 ; C23C16/30 ; H01L21/67 ; B05D7/24 ; H01L21/32
Abstract:
The present application discloses forming self-assembled monolayers (SAMs) by exposing the substrate at least twice to SAM precursors with intervening cooling of a substrate.
Public/Granted literature
- US20190019674A1 METHODS FOR PREPARING SELF-ASSEMBLED MONOLAYERS Public/Granted day:2019-01-17
Information query
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