Invention Grant
- Patent Title: Placement member and method of manufacturing the same
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Application No.: US14648221Application Date: 2013-11-14
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Publication No.: US10937684B2Publication Date: 2021-03-02
- Inventor: Masahiko Horiuchi
- Applicant: KYOCERA Corporation
- Applicant Address: JP Kyoto
- Assignee: KYOCERA Corporation
- Current Assignee: KYOCERA Corporation
- Current Assignee Address: JP Kyoto
- Agency: Procopio Cory Hargreaves and Savitch LLP
- Priority: JPJP2012-259425 20121128
- International Application: PCT/JP2013/080791 WO 20131114
- International Announcement: WO2014/084060 WO 20140605
- Main IPC: H01L21/687
- IPC: H01L21/687 ; G03F7/20 ; B05D7/00

Abstract:
A placement member (1) in accordance with an embodiment of the present invention includes a base (4) having a placement section (3) on which an object (2) is placed, and a coating film (5) that coats at least a part of the placement section (3). The placement section (3) has a bottom face (8), a plurality of projections (9) projecting from the bottom face (8), and an annular protrusion (10) that protrudes from the bottom face (8) at the same height as the plurality of projections (9) and surrounds the plurality of projections (9). The coating film (5) has a first region (15) that coats top faces (11) of the projections (9) and a second region (16) that coats a top face (13) of the annular protrusion (10) and has a smaller thickness than that of the first region (15).
Public/Granted literature
- US20150311108A1 PLACEMENT MEMBER AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2015-10-29
Information query
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