The invention relates to an apparatus for mass-spectrometric analysis and three-dimensional imaging of the surface of a sample, comprising at least one energy source for desorbing and/or ionizing atoms from the surface of a sample, a displacement stage, and a light source. Further, it comprises an interface in order to be able to interchange data with a mass spectrometer such that measurement data can be transmitted from a mass spectrometer to the evaluation unit via the interface such that the chemical composition of the measurement point can be determined by the evaluation unit. The surface of a sample can be captured in three dimensions and the topography of this surface can be determined by the evaluation unit.