Invention Grant
- Patent Title: Radiation source with temperature-controlled hollow fiber and a method for use in metrology applications
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Application No.: US16925586Application Date: 2020-07-10
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Publication No.: US10969542B2Publication Date: 2021-04-06
- Inventor: Hendrik Sabert , Patrick Sebastian Uebel
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G02B6/02
- IPC: G02B6/02 ; G01K11/3206

Abstract:
A system and method for providing a radiation source. In one arrangement, the radiation source includes an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.
Public/Granted literature
- US20210018676A1 RADIATION SOURCE AND A METHOD FOR USE IN METROLOGY APPLICATIONS Public/Granted day:2021-01-21
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