Invention Grant
- Patent Title: Piezo actuators for optical beam steering applications
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Application No.: US16072164Application Date: 2016-04-01
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Publication No.: US10969576B2Publication Date: 2021-04-06
- Inventor: Aleksandar Aleksov , Feras Eid , Sasha N. Oster , Shawna M. Liff , Johanna M. Swan , Thomas L. Sounart , Baris Bicen , Valluri R. Rao
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2016/025667 WO 20160401
- International Announcement: WO2017/171862 WO 20171005
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G02B26/08 ; G02B1/14

Abstract:
Disclosed herein are maskless imaging tools and display systems that include piezoelectrically actuated mirrors and methods of forming such devices. The maskless imaging tool may include a light source. Additionally, the tool may include one or more piezoelectrically actuated mirrors for receiving light from the light source. The piezoelectrically actuated mirrors are actuatable about one or more axes to reflect the light from the light source to a workpiece positioned to receive light from the piezoelectrically actuated mirror. Disclosed herein is a maskless imaging tool that is a laser direct imaging lithography (LDIL) tool. The maskless imaging tool may also be a via-drill tool. Disclosed herein is also a piezoelectrically actuated mirror used in a projection system. For example, the projection system may be integrated into a pair of glasses.
Public/Granted literature
- US20190025573A1 PIEZO ACTUATORS FOR OPTICAL BEAM STEERING APPLICATIONS Public/Granted day:2019-01-24
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