Invention Grant
- Patent Title: Semiconductor memory device having a vertical active region
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Application No.: US16691724Application Date: 2019-11-22
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Publication No.: US10971549B2Publication Date: 2021-04-06
- Inventor: Juntao Li , Kangguo Cheng , Takashi Ando , Dexin Kong
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Randall Bluestone
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
Embodiments of the invention provide a semiconductor memory device. In some embodiments, the device includes a bottom electrode extending in a y-direction relative to top surface of a substrate and a top electrode extending in an x-direction relative to the top surface of the substrate. An active area is located at the cross-section between the bottom electrode and the top electrode and is located on vertical side walls extending in a z-direction of the semiconductor memory device with respect to the top surface of the substrate. An insulating layer is located in the active area in between the top electrode and the bottom electrode.
Public/Granted literature
- US20200091245A1 SEMICONDUCTOR MEMORY DEVICE HAVING A VERTICAL ACTIVE REGION Public/Granted day:2020-03-19
Information query
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