Invention Grant
- Patent Title: Wafer level processed microbolometer focal plane array
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Application No.: US16373460Application Date: 2019-04-02
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Publication No.: US10976202B2Publication Date: 2021-04-13
- Inventor: William J. Parrish
- Applicant: Seek Thermal, Inc.
- Applicant Address: US CA Goleta
- Assignee: Seek Thermal, Inc.
- Current Assignee: Seek Thermal, Inc.
- Current Assignee Address: US CA Goleta
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: G01J5/04
- IPC: G01J5/04 ; G01J5/20 ; G01J5/00

Abstract:
Focal Plane Arrays (FPAs) or methods to produce FPAs may be provided for a microbolometer based thermal imaging sensor utilizing wafer level processing (WLP) techniques for manufacture. Batch processing techniques for sealing a cap wafer to an FPA wafer to produce vacuum sealed FPAs may be accomplished with suitable FPA design features in conjunction with a glass frit seal methodology utilizing appropriate frit glass compositions.
Public/Granted literature
- US20190301942A1 WAFER LEVEL PROCESSED MICROBOLOMETER FOCAL PLANE ARRAY Public/Granted day:2019-10-03
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