Invention Grant
- Patent Title: Semiconductor structure and manufacturing method thereof
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Application No.: US16529523Application Date: 2019-08-01
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Publication No.: US10978589B2Publication Date: 2021-04-13
- Inventor: Ling-Chun Chou , Kun-Hsien Lee
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Priority: CN201710761591.8 20170830
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/8234 ; H01L27/06 ; H01L27/088 ; H01L29/66 ; H01L29/165

Abstract:
A semiconductor structure is provided. The semiconductor structure includes a substrate, a plurality of first gate structures, a plurality of second gate structures, a first strained region, and a second strained region. The substrate has a first region and a second region. The first gate structures are disposed in the first region on the substrate. The second gate structures are disposed in the second region on the substrate. The first strained region is formed in the substrate and has a first distance from an adjacent first gate structure. The second strained region is formed in the substrate and has a second distance from an adjacent second gate structure, wherein the second distance is greater than the first distance.
Public/Granted literature
- US20190355849A1 SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2019-11-21
Information query
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