Local interconnect for group IV source/drain regions
Abstract:
Techniques are disclosed for forming transistor devices having reduced interfacial resistance in a local interconnect. The local interconnect can be a material having similar composition to that of the source/drain material. That composition can be a metal alloy of a group IV element such as nickel germanide. The local interconnect of the semiconductor integrated circuit can function in the absence of barrier and liner layers. The devices can be used on MOS transistors including PMOS transistors.
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