Invention Grant
- Patent Title: Vertical metal-air transistor
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Application No.: US16571997Application Date: 2019-09-16
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Publication No.: US10998424B2Publication Date: 2021-05-04
- Inventor: Juntao Li , Kangguo Cheng , Ruilong Xie , Chanro Park
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Douglas Pearson
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/66 ; H01L29/78 ; H01L21/768 ; H01L29/43 ; H01L29/40 ; H01L21/02

Abstract:
A method of forming a vertical metal-air transistor device is provided. The method includes forming a precursor stack with a stack template on the precursor stack on a substrate. The method further includes forming a bottom spacer on the substrate around the precursor stack, and depositing a liner casing on the precursor stack. The method further includes depositing a conductive gate layer on the bottom spacer and liner casing. The method further includes reducing the size of the stack template to form a template post on the precursor stack, and forming a stack cap on the template post and precursor stack.
Public/Granted literature
- US20210083075A1 VERTICAL METAL-AIR TRANSISTOR Public/Granted day:2021-03-18
Information query
IPC分类: