Invention Grant
- Patent Title: Polishing composition and polishing method using the same
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Application No.: US16226666Application Date: 2018-12-20
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Publication No.: US11008482B2Publication Date: 2021-05-18
- Inventor: Hye Kyung So , Myeong Hoon Han
- Applicant: SOULBRAIN CO., LTD.
- Applicant Address: KR Seongnam-si
- Assignee: SOULBRAIN CO., LTD.
- Current Assignee: SOULBRAIN CO., LTD.
- Current Assignee Address: KR Seongnam-si
- Agent Jongkook Park
- Priority: KR10-2018-0146650 20181123
- Main IPC: C09G1/04
- IPC: C09G1/04 ; H01L21/3105 ; C23F1/10 ; H01L21/321

Abstract:
The present invention relates to a polishing composition, and more particularly, to a chemical mechanical polishing (CMP) composition used to chemically and mechanically polish a semiconductor wafer. The polishing composition of the present invention, by comprising anion-modified silica polishing particles in which the zeta potential (ζ) is ≤−10 mV, can exhibit excellent polishing performance, and more specifically, which can achieve a high polishing rate with respect to an indium-containing polishing substrate, while improving the dispersibility of the composition and reducing residual defects on the substrate.
Public/Granted literature
- US20200165487A1 POLISHING COMPOSITION AND POLISHING METHOD USING THE SAME Public/Granted day:2020-05-28
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