Invention Grant
- Patent Title: Film-forming apparatus and film-forming method
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Application No.: US16378799Application Date: 2019-04-09
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Publication No.: US11035041B2Publication Date: 2021-06-15
- Inventor: Yoji Iizuka
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JPJP2018-076196 20180411
- Main IPC: C23C16/52
- IPC: C23C16/52 ; B05D1/00

Abstract:
There is provided a film-forming apparatus and a film-forming method. The film-forming apparatus, in a first period, sets the second heater to a temperature T1 at which no film is formed on a substrate disposed on the mounting stand without supplying a precursor gas into the process container, in a second period, sets the second heater to a temperature T2 at which no film is formed on the substrate and supplies a precursor gas into the process container from the precursor gas supply pipe, in a third period, sets the second heater to a film-forming temperature T3, and in the first to third periods, sets the first heater to a temperature T4 at which no film is formed on a periphery of a gas supply port of the precursor gas supply pipe.
Public/Granted literature
- US20190316257A1 Film-Forming Apparatus and Film-Forming Method Public/Granted day:2019-10-17
Information query
IPC分类: