Test device and test method of semiconductor storage device
Abstract:
A test device capable of measuring characteristics of respective transistors constituting a memory cell is provided. The test device for testing a SRAM connects a resistor to a bit line on one side of a memory cell selected by a word line selection circuit and a bit line selection circuit of the SRAM. In a manner that a selected transistor and a resistor of the memory cell constitute a source follower circuit, the test device applies a voltage to each portion of the memory cell, applies an input voltage to a gate of the transistor constituting the source follower circuit, and inputs an output voltage outputted from a source of the transistor constituting the source follower circuit.
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