Invention Grant
- Patent Title: Energy filter and charged particle beam apparatus
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Application No.: US16827156Application Date: 2020-03-23
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Publication No.: US11043353B2Publication Date: 2021-06-22
- Inventor: Kazuya Omoto
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JPJP2019-073666 20190408
- Main IPC: H01J37/05
- IPC: H01J37/05

Abstract:
An energy filter has a plurality of sector magnets which are configured symmetrically with respect to a symmetry plane, and forms a real image on the symmetry plane. The energy filter include: an entrance aperture provided with a slit having a longitudinal direction in a direction perpendicular to an energy dispersion direction; and a hexapole and a quadrupole disposed on the symmetry plane.
Public/Granted literature
- US20200321185A1 Energy Filter and Charged Particle Beam Apparatus Public/Granted day:2020-10-08
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