• Patent Title: Energy filter and charged particle beam apparatus
  • Application No.: US16827156
    Application Date: 2020-03-23
  • Publication No.: US11043353B2
    Publication Date: 2021-06-22
  • Inventor: Kazuya Omoto
  • Applicant: JEOL Ltd.
  • Applicant Address: JP Tokyo
  • Assignee: JEOL Ltd.
  • Current Assignee: JEOL Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: The Webb Law Firm
  • Priority: JPJP2019-073666 20190408
  • Main IPC: H01J37/05
  • IPC: H01J37/05
Energy filter and charged particle beam apparatus
Abstract:
An energy filter has a plurality of sector magnets which are configured symmetrically with respect to a symmetry plane, and forms a real image on the symmetry plane. The energy filter include: an entrance aperture provided with a slit having a longitudinal direction in a direction perpendicular to an energy dispersion direction; and a hexapole and a quadrupole disposed on the symmetry plane.
Public/Granted literature
Information query
Patent Agency Ranking
0/0