Invention Grant
- Patent Title: Substrate processing device
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Application No.: US15510552Application Date: 2015-03-10
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Publication No.: US11043398B2Publication Date: 2021-06-22
- Inventor: Michinori Iwao
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Ostrolenk Faber LLP
- Priority: JPJP2014-190106 20140918
- International Application: PCT/JP2015/057020 WO 20150310
- International Announcement: WO2016/042806 WO 20160324
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B05C13/02 ; B05B13/02 ; B05B15/06 ; H01L21/304

Abstract:
A substrate processing apparatus includes: a circulation pipe which defines a circulation passage through which a chemical liquid within a chemical-liquid tank is circulated; a supply pipe which guides the chemical liquid from the circulation pipe to a chemical-liquid nozzle; a supply valve which is switched between an open state in which the chemical liquid flowing through the supply pipe toward the chemical-liquid nozzle is passed and a closed state in which the supply of the chemical liquid from the supply pipe to the chemical-liquid nozzle is stopped; a recovery pipe which guides the chemical liquid from a cup to the chemical-liquid tank; and a branch pipe which guides the chemical liquid within the circulation pipe to the recovery pipe.
Public/Granted literature
- US20170256426A1 SUBSTRATE PROCESSING DEVICE Public/Granted day:2017-09-07
Information query
IPC分类: