Invention Grant
- Patent Title: Cleaning composition for semiconductor substrate
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Application No.: US16595899Application Date: 2019-10-08
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Publication No.: US11053457B2Publication Date: 2021-07-06
- Inventor: Shun Aoki , Kan-go Chung , Tomohiro Matsuki , Tatsuya Sakai , Kenji Mochida , Yuushi Matsumura
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2017-079797 20170413
- Main IPC: C11D3/37
- IPC: C11D3/37 ; C11D3/20 ; C11D1/00 ; H01L21/02

Abstract:
A composition for cleaning a semiconductor substrate contains: a novolak resin; an organic acid not being a polymeric compound; and a solvent. A solid content concentration of the composition is no greater than 20% by mass. The organic acid is preferably a carboxylic acid. The carboxylic acid is preferably a monocarboxylic acid, polycarboxylic acid or a combination thereof. The molecular weight of the organic acid is preferably from 50 to 500. The content of the organic acid with respect to 10 parts by mass of the novolak resin is preferably from 0.001 parts by mass to 10 parts by mass. The solvent includes preferably an ether solvent, an alcohol solvent, or a combination thereof. The proportion of the ether solvent, the alcohol solvent, or the combination thereof in the solvent is preferably no less than 50% by mass.
Public/Granted literature
- US20200040282A1 CLEANING COMPOSITION FOR SEMICONDUCTOR SUBSTRATE Public/Granted day:2020-02-06
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