Invention Grant
- Patent Title: Substrate temperature monitoring
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Application No.: US16254295Application Date: 2019-01-22
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Publication No.: US11053592B2Publication Date: 2021-07-06
- Inventor: Sanjay D. Yadav
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687 ; C23C16/52 ; G01J5/08 ; G01J5/00 ; C23C16/458 ; C23C16/46 ; C23C16/509 ; G01J5/04 ; G01J5/02 ; C23C14/54
Abstract:
Embodiments disclosed herein generally relate to a substrate temperature monitoring system in a substrate support assembly. In one embodiment, the substrate support assembly includes a lift pin. The lift pin has a body. The body has an interior passage and a rounded top surface configured for contacting a substrate when in use. A substrate temperature sensor disposed in the interior passage.
Public/Granted literature
- US20190153603A1 SUBSTRATE TEMPERATURE MONITORING Public/Granted day:2019-05-23
Information query
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