Invention Grant
- Patent Title: Apparatus for cost-effective conversion of unsupervised fault detection (FD) system to supervised FD system
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Application No.: US15457016Application Date: 2017-03-13
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Publication No.: US11054815B2Publication Date: 2021-07-06
- Inventor: Bradley D. Schulze , Suketu Arun Parikh , Jimmy Iskandar , Jigar Bhadriklal Patel
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G05B23/02
- IPC: G05B23/02

Abstract:
Techniques are provided for classifying runs of a recipe within a manufacturing environment. Embodiments monitor a plurality of runs of a recipe to collect runtime data from a plurality of sensors within a manufacturing environment. Qualitative data describing each semiconductor devices produced by the plurality of runs is determined. Embodiments characterize each run into a respective group, based on an analysis of the qualitative data, and generate a data model based on the collected runtime data. A multivariate analysis of additional runtime data collected during at least one subsequent run of the recipe is performed to classify the at least one subsequent run into a first group. Upon classifying the at least one subsequent run, embodiments output for display an interface depicting a ranking sensor types based on the additional runtime data and the description of relative importance of each sensor type for the first group within the data model.
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