Invention Grant
- Patent Title: Method for implementing a CD-SEM characterisation technique
-
Application No.: US16469868Application Date: 2017-12-12
-
Publication No.: US11055842B2Publication Date: 2021-07-06
- Inventor: Patrick Quemere , Jérôme Hazart
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: FR1662509 20161215
- International Application: PCT/EP2017/082427 WO 20171212
- International Announcement: WO2018/108912 WO 20180621
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06T7/60 ; H01J37/22 ; H01J37/28

Abstract:
A method for implementing a scanning electron microscopy characterisation technique for the determination of at least one critical dimension of the structure of a sample in the field of dimensional metrology, known as CD-SEM technique, the method including producing an experimental image representative of the structure of the sample and derived from a scanning electron microscope, from a first theoretical model based on parametric mathematical functions, calculating a second theoretical model obtained by algebraic summation of a corrective term, the corrective term being the convolution product between a given convolution kernel and the first theoretical model, the second theoretical model comprising a set of parameters to determine, and determining the set of parameters present in the second theoretical model by means of an adjustment between the second theoretical model and the experimental image.
Public/Granted literature
- US20190318472A1 METHOD FOR IMPLEMENTING A CD-SEM CHARACTERISATION TECHNIQUE Public/Granted day:2019-10-17
Information query