Invention Grant
- Patent Title: GaN-based microwave power device with large gate width and manufacturing method thereof
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Application No.: US16467993Application Date: 2018-08-29
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Publication No.: US11069787B2Publication Date: 2021-07-20
- Inventor: Hong Wang , Quanbin Zhou
- Applicant: SOUTH CHINA UNIVERSITY OF TECHNOLOGY
- Applicant Address: CN Guangdong
- Assignee: SOUTH CHINA UNIVERSITY OF TECHNOLOGY
- Current Assignee: SOUTH CHINA UNIVERSITY OF TECHNOLOGY
- Current Assignee Address: CN Guangdong
- Agency: JCIPRNET
- Priority: CN201711168295.3 20171121
- International Application: PCT/CN2018/102818 WO 20180829
- International Announcement: WO2019/100792 WO 20190531
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/423 ; H01L29/20 ; H01L29/417 ; H01L29/778

Abstract:
The present invention provides a GaN-based microwave power device with a large gate width and manufacturing method thereof. The device includes an AlGaN/GaN heterojunction epitaxial layer, a first dielectric layer overlying the AlGaN/GaN heterojunction epitaxial layer, a strip-like source electrode, a drain electrode distributed in a shape of a fishbone, an annular gate electrode, a second dielectric layer separating upper and lower electrodes, and an interconnect metal electrode pad. The GaN-based microwave power device with the large gate width prepared according to the present invention, has a small phase shift of the signals, a small parasitic capacitance of the device, a high signal gain, high power added efficiency and a high output power. At the same time, the manufacturing process of the device is simple, the chip area is saved, and the device has a good repeatability.
Public/Granted literature
- US20200044040A1 GAN-BASED MICROWAVE POWER DEVICE WITH LARGE GATE WIDTH AND MANUFACTURING METHOD THEREOF Public/Granted day:2020-02-06
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