Invention Grant
- Patent Title: Optical element moving apparatus, narrowed-line laser apparatus, and method for manufacturing electronic device
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Application No.: US16865537Application Date: 2020-05-04
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Publication No.: US11081853B2Publication Date: 2021-08-03
- Inventor: Yoshinobu Watabe , Masahide Kato , Hiroshi Furusato
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/106
- IPC: H01S3/106 ; G03F7/20 ; G02B7/02 ; G02B27/09 ; H01S3/038

Abstract:
An optical element moving apparatus includes a first holder configured to hold a first optical element, a second holder configured to hold a second optical element and having an inclination that inclines with respect to a first direction in which the second holder approaches the first holder, a guide section configured to be capable of moving the second holder in a direction parallel to the first direction, and an elastic member disposed in a position which is located between the first holder and the second holder and through which a first plane passes, the first plane intersecting the inclination at right angles and being parallel to the first direction.
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