Invention Grant
- Patent Title: RRAM cells in crossbar array architecture
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Application No.: US16665527Application Date: 2019-10-28
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Publication No.: US11101322B2Publication Date: 2021-08-24
- Inventor: Dexin Kong , Takashi Ando , Kangguo Cheng , Juntao Li
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Randall Bluestone
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L27/24 ; H01L45/00 ; G06N3/04

Abstract:
A method is presented for forming vertical crossbar resistive random access memory (RRAM) cells. The method includes forming a substantially U-shaped bottom electrode over a substrate, filling the U-shaped bottom electrode with a first conductive material, capping the U-shaped bottom electrode with a dielectric cap, depositing a high-k material, and forming a top electrode such that active areas of the RRAM cells are vertically aligned and the U-shaped bottom electrode is shared between neighboring RRAM cells.
Public/Granted literature
- US20200066797A1 RRAM CELLS IN CROSSBAR ARRAY ARCHITECTURE Public/Granted day:2020-02-27
Information query
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