Invention Grant
- Patent Title: Extreme ultraviolet generation apparatus
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Application No.: US16861595Application Date: 2020-04-29
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Publication No.: US11109474B2Publication Date: 2021-08-31
- Inventor: In Ho Choi , Min Seok Choi , Jeong-Gil Kim , Hyuck Shin , In Jae Lee , Sung Ho Jang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2019-0117195 20190924
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
An extreme ultraviolet generation apparatus is provided. The extreme ultraviolet generation apparatus includes a chamber, a droplet generator configured to provide a droplet into the chamber, a shroud which extends along a movement path of the droplet inside the chamber and surrounds the movement path of the droplet, a charging unit configured to charge the droplet, a monitoring unit configured to measure a position of the charged droplet, an alignment unit including at least one electromagnet, the alignment unit configured to correct the position of the charged droplet within the shroud using the at least one electromagnet, and an acceleration unit configured to accelerate the charged droplet after the position of the charged droplet has been corrected.
Public/Granted literature
- US20210092825A1 EXTREME ULTRAVIOLET GENERATION APPARATUS Public/Granted day:2021-03-25
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