Invention Grant
- Patent Title: Method for manufacturing a micromechanical sensor
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Application No.: US16323133Application Date: 2017-07-05
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Publication No.: US11111137B2Publication Date: 2021-09-07
- Inventor: Johannes Classen
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102016216207.1 20160829
- International Application: PCT/EP2017/066724 WO 20170705
- International Announcement: WO2018/041444 WO 20180508
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H04R19/00 ; H04R31/00 ; B81B3/00 ; B81B7/00

Abstract:
A method for manufacturing a micromechanical sensor, including the steps: providing a MEMS wafer that includes a MEMS substrate, a defined number of etching trenches being formed in the MEMS substrate in a diaphragm area, the diaphragm area being formed in a first silicon layer that is situated at a defined distance from the MEMS substrate; providing a cap wafer; bonding the MEMS wafer to the cap wafer; and forming a media access point to the diaphragm area by grinding the MEMS substrate.
Public/Granted literature
- US20190161347A1 METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR Public/Granted day:2019-05-30
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