Invention Grant
- Patent Title: Fan filter unit, sterilization apparatus and clean room
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Application No.: US16470276Application Date: 2018-02-15
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Publication No.: US11112143B2Publication Date: 2021-09-07
- Inventor: Makoto Yokoyama , Takeshi Matsumura , Hirotoshi Sato
- Applicant: Hitachi Industrial Equipment Systems Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Hitachi Industrial Equipment Systems Co., Ltd.
- Current Assignee: Hitachi Industrial Equipment Systems Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JPJP2017-111702 20170606
- International Application: PCT/JP2018/005258 WO 20180215
- International Announcement: WO2018/225298 WO 20181213
- Main IPC: F24F13/28
- IPC: F24F13/28 ; B01L1/00 ; F24F7/06 ; F24F7/007 ; F24F13/20 ; F24F3/167 ; F24F8/108

Abstract:
Provided are a fan filter unit and a sterilization apparatus capable of shortening a sterilization operation time to be performed at a changeover. The sterilization apparatus has: a working space; a fan filter unit for supplying clean air to the working space; and a sterilizing gas charging unit on the air suction side of the fan filter unit. The fan filter unit comprises: a fan unit section constituted by an air blower and a pressurization chamber; a dust removal filter provided on the downstream side of the fan unit section; a passage bypassing the dust removal filter; and an opening and closing mechanism of the passage. By opening the opening and closing mechanism, the air flow not passing through the dust removal filter can be supplied to the secondary side of the fan filter unit.
Public/Granted literature
- US20200096229A1 Fan Filter Unit, Sterilization Apparatus and Clean Room Public/Granted day:2020-03-26
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