Invention Grant
- Patent Title: Reactor, system including the reactor, and methods of manufacturing and using same
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Application No.: US15923834Application Date: 2018-03-16
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Publication No.: US11114283B2Publication Date: 2021-09-07
- Inventor: Tom Blomberg , Varun Sharma , Chiyu Zhu
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01J37/32 ; H01L21/687
Abstract:
A reactor for processing substrates and methods for manufacturing and using the reactor are disclosed. Specifically, the reactor can include a material that forms gas compounds. The gas compounds are then easily removed from the reactor, thus reducing or avoiding contamination of the substrates in the reactor that would otherwise arise.
Public/Granted literature
- US20190287769A1 REACTOR, SYSTEM INCLUDING THE REACTOR, AND METHODS OF MANUFACTURING AND USING SAME Public/Granted day:2019-09-19
Information query
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