Invention Grant
- Patent Title: High speed/low dose multi-objective autonomous scanning materials imaging
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Application No.: US16758326Application Date: 2018-10-25
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Publication No.: US11120968B2Publication Date: 2021-09-14
- Inventor: Karl A. Hujsak , Vinayak P. Dravid
- Applicant: Northwestern University
- Applicant Address: US IL Evanston
- Assignee: Northwestern University
- Current Assignee: Northwestern University
- Current Assignee Address: US IL Evanston
- Agency: Bell & Manning LLC
- International Application: PCT/US2018/057455 WO 20181025
- International Announcement: WO2019/221778 WO 20191121
- Main IPC: H01J37/28
- IPC: H01J37/28 ; G01N23/2251

Abstract:
Aspects of the present disclosure involve applying a Multi-Objective Autonomous Dynamic Sampling algorithm in an electron or other radiation/charged-particle microscope for the characterization of elemental, chemical, and crystallographic information with over an order of magnitude improvement in time and exposure.
Public/Granted literature
- US20200321188A1 HIGH SPEED/LOW DOSE MULTI-OBJECTIVE AUTONOMOUS SCANNING MATERIALS IMAGING Public/Granted day:2020-10-08
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