Invention Grant
- Patent Title: Field plate structures with patterned surface passivation layers and methods for manufacturing thereof
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Application No.: US16793590Application Date: 2020-02-18
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Publication No.: US11121245B2Publication Date: 2021-09-14
- Inventor: Jianjun Cao , Jie Hu , Yoganand Saripalli , Muskan Sharma
- Applicant: Efficient Power Conversion Corporation
- Applicant Address: US CA El Segundo
- Assignee: Efficient Power Conversion Corporation
- Current Assignee: Efficient Power Conversion Corporation
- Current Assignee Address: US CA El Segundo
- Agency: Blank Rome LLP
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/78 ; H01L29/51 ; H01L29/20 ; H01L29/40 ; H01L29/66

Abstract:
A gallium nitride (GaN) transistor which includes multiple insulator semiconductor interface regions. Two or more first insulator segments and two or more second insulator segments are positioned between the gate and drain contacts and interleaved together. At least one first insulator segment is nearer to the gate contact than the second insulator segments. At least one second insulator segment is nearer to the drain contact than the first insulator segments. The first and second insulators are chosen such that a net electron donor density above the channel under the first insulator segments is lower than a net electron density above the channel under the second insulator segments. The first insulator segments reduce gate leakage and electric fields near the gate that cause high gate-drain charge. The second insulator segments reduce electric fields near the drain contact and provide a high density of charge in the channel for reduced on-resistance.
Public/Granted literature
- US20200273977A1 FIELD PLATE STRUCTURES WITH PATTERNED SURFACE PASSIVATION LAYERS AND METHODS FOR MANUFACTURING THEREOF Public/Granted day:2020-08-27
Information query
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