Invention Grant
- Patent Title: Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure
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Application No.: US16767987Application Date: 2018-11-22
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Publication No.: US11156921B2Publication Date: 2021-10-26
- Inventor: Raphael Nico Johan Stegen , Giovanni Luca Gattobigio , Theodorus Wilhelmus Polet
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP17207820 20171215
- International Application: PCT/EP2018/082188 WO 20181122
- International Announcement: WO2019/115197 WO 20190620
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A fluid handling structure configured to confine immersion fluid to a region of a lithographic apparatus, the fluid handling structure having an aperture formed therein for the passage therethrough of a radiation beam through the immersion fluid, the aperture defining an immersion space to be filled with the immersion fluid, and having an inner part and an outer part, wherein the inner part and the outer part are arranged so as to form therebetween a variable space and a connecting space that connects the variable space to the immersion space, wherein the outer part is movable relative to the inner part in a first plane so as to change in shape the variable space but not the connecting space, and wherein the fluid handling structure is configured to contain the immersion fluid in the variable space.
Public/Granted literature
- US20210191275A1 FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS, AND METHOD OF USING A FLUID HANDLING STRUCTURE Public/Granted day:2021-06-24
Information query
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