Invention Grant
- Patent Title: Semiconductor device with at least a portion of gate electrode enclosed by an insulating structure and method of fabricating the same
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Application No.: US16722622Application Date: 2019-12-20
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Publication No.: US11195950B2Publication Date: 2021-12-07
- Inventor: Kyujin Kim , Hui-Jung Kim , Junsoo Kim , Sangho Lee , Jae-Hwan Cho , Yoosang Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2019-0079528 20190702
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/762 ; H01L21/311 ; H01L27/108 ; H01L29/66 ; H01L29/423 ; H01L21/8234

Abstract:
A semiconductor device may include active patterns extended in a first direction and spaced apart from each other in the first direction, a device isolation layer defining the active patterns, an insulating structure provided between the active patterns and between the device isolation layer, and a gate structure disposed on the insulating structure and extended in a second direction crossing the first direction. The gate structure may include an upper portion and a lower portion. The lower portion of the gate structure may be enclosed by the insulating structure.
Public/Granted literature
- US20210005506A1 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2021-01-07
Information query
IPC分类: