Invention Grant
- Patent Title: Method and system for automatic zone axis alignment
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Application No.: US16730998Application Date: 2019-12-30
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Publication No.: US11211222B2Publication Date: 2021-12-28
- Inventor: John J. Flanagan , Nathaniel Kurtz , Ashley Tilson , Phillip Parker
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/28 ; G01N23/20058 ; H01J37/22
Abstract:
Automatic alignment of the zone axis of a sample and a charged particle beam is achieved based on a diffraction pattern of the sample. An area corresponding to the Laue circle is segmented using a trained network. The sample is aligned with the charged particle beam by tilting the sample with a zone axis tilt determined based on the segmented area.
Public/Granted literature
- US20210202205A1 METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT Public/Granted day:2021-07-01
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