Invention Grant
- Patent Title: Spectral analysis device and spectral analysis method
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Application No.: US16763424Application Date: 2018-10-17
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Publication No.: US11215507B2Publication Date: 2022-01-04
- Inventor: Takeshi Hasegawa , Nobutaka Shioya
- Applicant: KYOTO UNIVERSITY
- Applicant Address: JP Kyoto
- Assignee: KYOTO UNIVERSITY
- Current Assignee: KYOTO UNIVERSITY
- Current Assignee Address: JP Kyoto
- Agency: McGinn I.P. Law Group PLLC
- Priority: JPJP2017-222322 20171117
- International Application: PCT/JP2018/038601 WO 20181017
- International Announcement: WO2019/097939 WO 20190523
- Main IPC: G01J3/447
- IPC: G01J3/447 ; G01N21/27 ; G01N21/66 ; G01N21/84

Abstract:
A spectral analysis device includes a light source, a support body, a linear polarization filter, a detection unit, a regression computation unit, and an absorbance spectrum calculation unit. The support body is fixed such that an incident angle of the light is a predetermined incident angle θ. The linear polarization filter is configured such that lights with polarization angles ϕn ranging from 0° to 90° are irradiated to the support body. The detection unit detects a transmitted spectrum S from transmitted lights with the polarization angles ϕn. The regression computation unit obtains an in-plane spectrum sip and an out-of-plane spectrum sop through regression analysis by using the transmitted spectrum S and a mixing ratio R. The absorbance spectrum calculation unit calculates an in-plane absorbance spectrum Aip and an out-of-plane absorbance spectrum Aop of the thin film based on the in-plane spectrum and the out-of-plane spectrum.
Public/Granted literature
- US20200300703A1 SPECTRAL ANALYSIS DEVICE AND SPECTRAL ANALYSIS METHOD Public/Granted day:2020-09-24
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