Invention Grant
- Patent Title: Pick-and-place tool having multiple pick up elements
-
Application No.: US16300595Application Date: 2017-04-20
-
Publication No.: US11232960B2Publication Date: 2022-01-25
- Inventor: Yang-Shan Huang , Alexey Olegovich Polyakov , Coen Adrianus Verschuren , Pieter Willem Herman De Jager
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP16169553 20160513
- International Application: PCT/EP2017/059391 WO 20170420
- International Announcement: WO2017/194286 WO 20171116
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H05K3/30 ; H01L21/683

Abstract:
A pick-and-place tool including a plurality of movable holder structures, and a plurality of pick-and-place structures, each holder structure accommodating two or more of the pick-and-place structures, wherein at least one of the two or more pick-and-place structures of a respective holder structure is able to move along a respective holder structure independently from another at least one of the two or more pick-and-place structures of the respective holder structure, and wherein each pick-and-place structure includes a pick-up element configured to pick up a donor component at a donor structure and place the donor component an acceptor structure.
Public/Granted literature
- US20190148189A1 MULTIPLE MINIATURE PICK UP ELEMENTS FOR A COMPONENT STACKING AND/OR PICK-AND-PLACE PROCESS Public/Granted day:2019-05-16
Information query
IPC分类: