Invention Grant
- Patent Title: Thermal pattern sensor with pyroelectric capacitance
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Application No.: US16207313Application Date: 2018-12-03
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Publication No.: US11237058B2Publication Date: 2022-02-01
- Inventor: Mohammed Benwadih , Amélie Revaux
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pearne & Gordon LLP
- Priority: FR1761602 20171204
- Main IPC: G01J5/10
- IPC: G01J5/10 ; G06K9/00 ; G01J5/00 ; G01J5/34

Abstract:
Thermal pattern sensor comprising several pixels arranged on a substrate, each pixel including at least one pyroelectric capacitance formed by at least one portion of pyroelectric material arranged between at least one lower electrode and at least one upper electrode, with the lower electrode arranged between the substrate and the portion of pyroelectric material, and in which at least one protective dielectric layer is arranged between the portion of pyroelectric material and the upper electrode and comprises at least one of the following materials: fluoropolymer, self-assembled molecular monolayer, dielectric material soluble in a solvent orthogonal to the pyroelectric material.
Public/Granted literature
- US20190170587A1 CAPTEUR DE MOTIF THERMIQUE A CAPACITE PYROELECTRIQUE Public/Granted day:2019-06-06
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