Invention Grant
- Patent Title: Detecting method and detecting equipment therefor
-
Application No.: US15847363Application Date: 2017-12-19
-
Publication No.: US11237414B2Publication Date: 2022-02-01
- Inventor: Chung-Kuang Chien
- Applicant: HKC Corporation Limited , Chongqing HKC Optoelectronics Technology Co., ltd.
- Applicant Address: CN Shenzhen; CN Chongqing
- Assignee: HKC Corporation Limited,Chongqing HKC Optoelectronics Technology Co., ltd.
- Current Assignee: HKC Corporation Limited,Chongqing HKC Optoelectronics Technology Co., ltd.
- Current Assignee Address: CN Shenzhen; CN Chongqing
- Agency: WPAT, PC
- Priority: CN201611108938.0 20161206
- Main IPC: G02F1/13
- IPC: G02F1/13 ; H01J37/22 ; H01J37/28 ; H01J37/31 ; H01J37/30 ; C23C16/02 ; C23C16/48 ; G02F1/1368 ; G02F1/1333

Abstract:
A detecting method and a detecting equipment therefor are provided. The detecting method includes: inspecting whether a display panel has a defective position; after acquiring the defective position of the display panel by the inspecting, using a first focused ion beam generated by a first ion overhaul apparatus to cut the defective position of the display panel, so as to strip a defect at the defective position and observe morphology of defect; using a repair apparatus to perform a repair treatment on the defective position after the defect is stripped. An inspection apparatus for the inspecting of the defective position, the first ion overhaul apparatus and the repair apparatus are sequentially installed on the same production line.
Public/Granted literature
- US20180157067A1 DETECTING METHOD AND DETECTING EQUIPMENT THEREFOR Public/Granted day:2018-06-07
Information query