Invention Grant
- Patent Title: Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method
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Application No.: US16490010Application Date: 2018-03-01
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Publication No.: US11237472B2Publication Date: 2022-02-01
- Inventor: Yohei Ikebe , Junichi Horikawa , Takahiro Onoue , Mizuki Kataoka
- Applicant: HOYA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HOYA CORPORATION
- Current Assignee: HOYA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: JPJP2017-039100 20170302
- International Application: PCT/JP2018/007897 WO 20180301
- International Announcement: WO2018/159785 WO 20180907
- Main IPC: G03F1/24
- IPC: G03F1/24 ; G03F1/54 ; G03F7/20

Abstract:
Provided are a reflective mask blank and a reflective mask, which are able to reduce the shadowing effects of EUV lithography and form a fine pattern. As a result, a semiconductor device can be stably manufactured with high transfer accuracy. The reflective mask blank comprises a multilayer reflective film and an absorber film in that order on a substrate, and the absorber film comprises a material comprising an amorphous metal comprising at least one or more elements among cobalt (Co) and nickel (Ni).
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