Invention Grant
- Patent Title: Multilayer insulator stack for ferroelectric transistor and capacitor
-
Application No.: US16640043Application Date: 2017-09-29
-
Publication No.: US11239361B2Publication Date: 2022-02-01
- Inventor: Uygar E. Avci , Joshua M. Howard , Seiyon Kim , Ian A. Young
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Finch & Maloney PLLC
- International Application: PCT/US2017/054592 WO 20170929
- International Announcement: WO2019/066962 WO 20190404
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L49/02 ; H01L29/51

Abstract:
Described is an apparatus which comprises: a first layer comprising a semiconductor; a second layer comprising an insulating material, the second layer adjacent to the first layer; a third layer comprising a high-k insulating material, the third layer adjacent to the second layer; a fourth layer comprising a ferroelectric material, the fourth layer adjacent to the third layer; and a fifth layer comprising a high-k insulating material, the fifth layer adjacent to the fourth layer.
Public/Granted literature
- US20200235243A1 MULTILAYER INSULATOR STACK FOR FERROELECTRIC TRANSISTOR AND CAPACITOR Public/Granted day:2020-07-23
Information query
IPC分类: