Invention Grant
- Patent Title: Structure of memory device and fabrication method thereof
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Application No.: US16505190Application Date: 2019-07-08
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Publication No.: US11239419B2Publication Date: 2022-02-01
- Inventor: Hai Tao Liu , Li Li Ding , Yao-Hung Liu , Guoan Du , Qi Lu Li , Chunlei Wan , Yi Yu Lin , Yuchao Chen , Huakai Li , Hung-Yueh Chen
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Priority: CN201910484945.8 20190605
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
The present invention relates to a structure of a memory device. The structure of a memory device includes a substrate, including a bottom electrode layer formed therein. A buffer layer is disposed on the substrate, in contact with the bottom electrode layer. A resistive layer surrounds a whole sidewall of the buffer layer, and extends upward vertically from the substrate. A mask layer is disposed on the buffer layer and the resistive layer. A noble metal layer is over the substrate, and fully covers the resistive layer and the mask layer. A top electrode layer is disposed on the noble metal layer.
Information query
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