Invention Grant
- Patent Title: Reactor and production method of trichlorosilane
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Application No.: US16756042Application Date: 2018-11-16
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Publication No.: US11241666B2Publication Date: 2022-02-08
- Inventor: Kenji Hirota , Katsuya Ogihara
- Applicant: TOKUYAMA CORPORATION
- Applicant Address: JP Yamaguchi
- Assignee: TOKUYAMA CORPORATION
- Current Assignee: TOKUYAMA CORPORATION
- Current Assignee Address: JP Yamaguchi
- Agency: Casimir Jones, S.C.
- Agent Brian F. Bradley
- Priority: JPJP2017-223142 20171120
- International Application: PCT/JP2018/042559 WO 20181116
- International Announcement: WO2019/098347 WO 20190523
- Main IPC: B01J8/24
- IPC: B01J8/24 ; B01J8/18 ; B01J19/02 ; C01B33/107

Abstract:
An object of the present invention is to prevent stress-corrosion cracking of a header (40) of a reactor. A reactor for producing trichlorosilane by causing metal silicon powder and a hydrogen chloride gas to react with each other includes a cooler (70), the cooler including a plurality of heat transfer medium pipes (30) and a header (40), the plurality of heat transfer medium pipes being provided in a fluid bed (60) inside the reactor, the header being provided in a freeboard section (50) inside the reactor, the header being comprised of a corrosion-resistant material.
Public/Granted literature
- US20200306714A1 REACTOR AND PRODUCTION METHOD OF TRICHLOROSILANE Public/Granted day:2020-10-01
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