Silicon Carbide Powder, and Production Method Thereof

    公开(公告)号:US20250162882A1

    公开(公告)日:2025-05-22

    申请号:US18840717

    申请日:2023-02-10

    Inventor: Yutaka Fukunaga

    Abstract: Please delete the Abstract in its entirety and substitute therefor the following new A silicon carbide powder contains free carbon in a content of 0.04 mass % or less, in which a ratio of silicon atoms to carbon atoms (Si/C molar ratio) is 1.00 to 1.02. The silicon carbide powder can be produced by a method including a combustion synthesis step of preheating a mixed powder containing a metal silicon powder and a carbon powder having a Si/C molar ratio of 1.00 or more and 1.02 or less at a temperature of 900° C. to 1300° C. under an inert atmosphere, and igniting a part of the mixed powder to perform combustion synthesis to obtain a crude silicon carbide powder; and a heating step of heating the crude silicon carbide powder at a temperature of 2000° C. to 2500° C. under an inert atmosphere. In addition, the silicon carbide powder can also be obtained, without undergoing the heating step, by preheating the mixed powder at a temperature of 900° C. to 1300° C. under an atmospheric pressure and an inert atmosphere, and igniting a part of the mixed powder to perform combustion synthesis.

    SEMICONDUCTOR PROCESSING SOLUTION

    公开(公告)号:US20250084309A1

    公开(公告)日:2025-03-13

    申请号:US18707255

    申请日:2023-10-02

    Abstract: Provided is a treatment liquid for a semiconductor to be used for removing a transition metal-containing substance on a substrate, the treatment liquid for a semiconductor containing a specific halogen oxyacid ion, at least one ion selected from the group consisting of a bromide ion, a bromite ion, a bromate ion, a chloride ion, a chlorate ion, an iodate ion, an iodide ion, and a triiodide ion, and at least one metal selected from the group consisting of Ca, Na, K, Cr, Ni, and Al, wherein a concentration of any one metal of Ca, Na, K, Cr, Ni, or Al is 0.1 ppt or more and 200 ppt or less.

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