Invention Grant
- Patent Title: Electron microscope stage
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Application No.: US16686004Application Date: 2019-11-15
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Publication No.: US11244805B2Publication Date: 2022-02-08
- Inventor: Albert Visscher
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Klarquist Sparkman, LLP
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/18 ; H01J37/28

Abstract:
A positioning system for an electron microscope includes a first carriage comprising a holder for holding a workpiece and a second carriage. The first carriage being coupled to one or more first drive units configured to position the workpiece along first, second, and third axes, and along a first tilt axis. The second carriage housing the one or more first drive units and being coupled to one or more second drive units configured to position the workpiece along a second tilt axis.
Public/Granted literature
- US20210151281A1 ELECTRON MICROSCOPE STAGE Public/Granted day:2021-05-20
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