Invention Grant
- Patent Title: Solid particle source, treatment system and method
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Application No.: US16603838Application Date: 2018-04-25
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Publication No.: US11247225B2Publication Date: 2022-02-15
- Inventor: Maik Vieluf
- Applicant: VON ARDENNE Asset GmbH & Co. KG
- Applicant Address: DE Dresden
- Assignee: VON ARDENNE Asset GmbH & Co. KG
- Current Assignee: VON ARDENNE Asset GmbH & Co. KG
- Current Assignee Address: DE Dresden
- Agency: Viering, Jentschura & Partner mbB
- Priority: DE102017109249.8 20170428
- International Application: PCT/EP2018/060592 WO 20180425
- International Announcement: WO2018/197560 WO 20181101
- Main IPC: C23C14/30
- IPC: C23C14/30 ; B05D1/06 ; B05D3/04 ; C23C14/02

Abstract:
The invention relates to various embodiments of a solid particle-source (100a, 100a) that can comprise: a container (104) which comprises an area for receiving solid particles; at least one electron source (106) for introducing electrons into the solid particles such that an electrostatic charge of the solid particles produced by the electrons separates them from each other and accelerates them in a direction out from the container (104); a vibration source (110) which is designed to introduce a vibration in the region in order to loosen the solid particles, the electronic source comprising an emission surface for emitting electrons into a vacuum emission region.
Information query
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